DHM® R2000 series

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即時四維形貌量測
微熱板加熱形變	即時四維形貌量測
水滴揮發全過程	可加熱降解材料揮發
可測高達25MHz的MEMS器件全視場週期振動
24.7MHz表面聲波	慣性感測器
微執行器	MEMS懸臂梁
MEMS微翻轉鏡	超聲感測器

Real-time measurements extended to 3 μm high steps keeping nanometer vertical resolution

A new level is reached for real-time measurements in interference microscopy. The DHM R2100 family performs measurements at two wavelengths simultaneously. Its innovating optical schema is composed of two nested DHM with common object path and camera. This unique feature, offered by DHM’s principle, provides a dual wavelength real-time measurement mode that allows:

	an increase of the measurement range to step heights of up to 3 µm, without any scanning or wavelength switch
	real-time measurements for both single and dual wavelengths modes and full frame phase and intensity images at video rate
	sub-nanometer resolution over the complete vertical range using mapping algorithms
	dual wavelength measurements providing the same tools, ease-of-use and insensitivity to vibrations as single wavelength

Dual wavelength mode: keep the speed and ease-of-use

DHM R2100 family enables two interferences to take place simultaneously onto the same camera. Both are recorded on the same hologram and then independently reconstructed. They are combined at video rate to extend the measurement range to 3 microns as if the sample was imaged with a single wavelength, called synthetic wavelength, equivalent to the low frequency beating of the two monochromatic wavelengths. Working in dual wavelength mode is identical as in single wavelength. It keeps the same ease-of-use and facilities, such as sequences, roughness measurements, time monitoring,... Depending on your sample height, real-time measurements can be performed on either single monochromatic wavelengths data or on their synthetic combination. Switching between the two measurement ranges is possible within a single acquisition as all the information is recorded simultaneously in the hologram and the measurements computed out of it.

Mapping: keep the vertical resolution

The sub-nanometer vertical resolution of the monochromatic wavelength measurements can be kept over the dual wavelength measurement range thanks to powerful mapping algorithms combining the synthetic and monochromatic wavelengths data. The mapping is performed out of the unique dual wavelength acquisition.

The simultaneous recording of data results in the fastest measurements over microns in interference microscopy. It avoids any blurring due to acquisition time and thus ensures precision and robustness toward external vibrations. The real-time display of the measurements guaranties the ease-of-use and efficiency of DHM. The measurement range can further be increased to the millimeter range with the vertical coherence scanning module.

The DHM R2101 model has a synthetic wavelength of 6 μm for step heights up to 3 μm.

IIt is compatible with the optional Lyncée Tec stroboscopic module in single wavelength and different manual or motorized stages. Other synthetic wavelengths are available allowing higher measurement ranges without mapping or stroboscopic compatibility. 

動態3D即時全像量測定量系統