DHM® R1100 series

即時四維形貌量測
微熱板加熱形變	即時四維形貌量測
水滴揮發全過程	可加熱降解材料揮發
可測高達25MHz的MEMS器件全視場週期振動
24.7MHz表面聲波	慣性感測器
微執行器	MEMS懸臂梁
MEMS微翻轉鏡	超聲感測器

Lyncée Tec’s DHM R1100 series of reflection configured high precision ptical profilers offers the ultimate technology based on Digital Holographic icroscopy. It keeps the features, the versatility and ease-of-use of the HM R1000 series. In addition to the single wavelength mode that gives hese instruments the same real-time performances, the DHM R1101 and R1102 ave two additional operating modes:

•the alternate dual wavelength mode for fast measurements of steps up to 10 μm and smooth samples up to the objective’s depth of field
•the vertical coherence scanning mode for vertical dimensions up to 10 mm


DHM R1100 series is compatible with the optional Lyncée Tec stroboscopic module fo intuitive investigation of MEMS / MOEMS.
The signal generator is integrated into the module, allowing the powerful Koala oftware to drive your sample and synchronize the acquisition in order to retrieve its full-field topography along the complete cycle, in a similar way to the real-time mode.

The off-axis holographic principle ensures the vertical calibration is only etermined by the wavelength. No mechanical movement needs to be calibrated. HM’s single and dual wavelength modes are thus the optical profiler modes ith the least systematic error sources on the market. DHM thus not only ensures igh accuracy, but also ultimate precision.

•the DHM R1101 may be fitted with manual or motorized stages up to 150 mm × 150 mm travel range for sample with dimension up to 415 mm
•the DHM R1102 may be fitted with larger motorized stages up to 300 mm × 300 mm travel range for samples with dimensions up to 530 mm × 870 mm

The R1101 can be upgraded to the R1102.

動態3D即時全像量測定量系統