Resistivity Measurement System

Test in variable temperature from RT to 300dc ( Based on van der pauw technique ) 300dc test board can be purchased as an option
Why it must be ecopia’s resistivity test system?
1. Accurate and powerful resistivity test system by getting 8 data values and calculate it’s average. Checking ohmic contact by flowing +/- input current.
2. Easy to test by various kind of sample mounting board and mechanic tool.
3 . Test in Variable temperature from RT to 300dc(as option) by using 8 inch heating chuck.
4. Convenient to test various size and thickness sample by SPCB (Spring Clip type sample mounting board) that can make it possible to move X.Y.Z easily. Convenient to replace sample.
5. It is useful to probe wafer surface’s each point one by one, by moving X.Y.Z axis. Each X.Y.Z has micrometer to see as to how much doping level is.
6. Successful test of Resistance(Ω), Sheet Resistance(Ω/sq), Resistivity (Ωcm).
7. Input current: 1nA ~ 20mA ( Easily check “Contact fail”)
8. Resistivity range: 10exp-4 ~ 10exp7 Ωcm
9. I-V, I-R curve plotting capability for 4point each terminal. It is possible to check ohmic contact quality.