DHM® R1100 series

即时四维形貌量测
微热板加热形变	即时四维形貌量测
水滴挥发全过程	可加热降解材料挥发
可测高达25MHz的MEMS器件全视场周期振动
24.7MHz表面声波	惯性感测器
微执行器	MEMS悬臂梁
MEMS微翻转镜	超声感测器

Lyncée Tec’s DHM R1100 series of reflection configured high precision ptical profilers offers the ultimate technology based on Digital Holographic icroscopy. It keeps the features, the versatility and ease-of-use of the HM R1000 series. In addition to the single wavelength mode that gives hese instruments the same real-time performances, the DHM R1101 and R1102 ave two additional operating modes:

•the alternate dual wavelength mode for fast measurements of steps up to 10 μm and smooth samples up to the objective’s depth of field
•the vertical coherence scanning mode for vertical dimensions up to 10 mm


DHM R1100 series is compatible with the optional Lyncée Tec stroboscopic module fo intuitive investigation of MEMS / MOEMS.
The signal generator is integrated into the module, allowing the powerful Koala oftware to drive your sample and synchronize the acquisition in order to retrieve its full-field topography along the complete cycle, in a similar way to the real-time mode.

The off-axis holographic principle ensures the vertical calibration is only etermined by the wavelength. No mechanical movement needs to be calibrated. HM’s single and dual wavelength modes are thus the optical profiler modes ith the least systematic error sources on the market. DHM thus not only ensures igh accuracy, but also ultimate precision.

•the DHM R1101 may be fitted with manual or motorized stages up to 150 mm × 150 mm travel range for sample with dimension up to 415 mm
•the DHM R1102 may be fitted with larger motorized stages up to 300 mm × 300 mm travel range for samples with dimensions up to 530 mm × 870 mm

The R1101 can be upgraded to the R1102.

动态3D即时全像量测定量系统