產品型號: PVD System
This is a multi - phase composite coating system which meets any needs of customers by using the ultimate combination Of Linear lon Source , UBM Sputter , and FCVA Source.
PDF規格:
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Size |
Custom-made |
|
Jig |
6 axis rotation type |
|
Precursor Gas |
mass flow control system Ar, N2, O2, C2H2, CH4, C6H6, etc. |
|
Plasma Source |
Linear ion source Unbalanced Magnetron Sputter Filtered Cathodic Vacuum Arc |
|
Base Pressure |
˜10 -6 torr |
|
Bias Power |
DC Pulse |
|
Heater |
Max. 450 °C |
|
Device Operation |
Fully Automatic/Semi Automatic |